Dedicated UHV chamber contains a VG 6-axis sample manipulator (3 translations and 3 rotations). The MEIS technique utilized a toroidal electrostatic energy analyzer (TEA, High Voltage Engineering Europa) with an energy resolution (delta E/E) of 0.003).
The position sensitive detector accepts ions scattered over a range of up to 30o with a precision of 0.2o.
A spectrum of scattering events versus scattered energy and angle is collected in this experiment. Double alignment of incident and scattered ions with the crystal lattice allows high resolution measurement of the near surface structure.